This paper appears in: SOC Conference, 2008 IEEE International
Publication Date: 17-20 Sept. 2008
On page(s): 5-6
Location: Newport Beach, CA, USA,
ISBN: 978-1-4244-2596-9
Digital Object Identifier: 10.1109/SOCC.2008.4641468
Current Version Published: 2008-10-10
Abstract
The science fiction of yesterday depicted by such characters as Captain Kirk of the space ship Enterprise has stretched the minds of researchers that no longer scaling of feature size predicted by Gordon Moore is seen to adequately provide the necessary technology direction. While ITRS is driving the search for fabrication solutions inexorably close towards the physical limits, integration and convergence of disparate technologies promise a solution to the severe problems being encountered as process geometries are reduced.
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