A Single-Crystal-Silicon Bulk-Acoustic-Mode Microresonator Oscillator
Lee, J.E.-Y.
Bahreyni, B.
Yong Zhu
Seshia, A.A.
Dept. of Eng., Univ. of Cambridge, Cambridge;
This paper appears in: Electron Device Letters, IEEE
Publication Date: July 2008
Volume: 29,
Issue: 7
On page(s): 701-703
ISSN: 0741-3106
INSPEC Accession Number: 10132870
Digital Object Identifier: 10.1109/LED.2008.2000643
Current Version Published: 2008-07-09
Abstract
A timing reference incorporating a single-crystal-silicon micromechanical resonator with a quality factor of larger than one million and a resonant frequency of 2.18 MHz is demonstrated. The resonator is excited in the square extensional bulk acoustic mode at 4 mtorr, and it has been fabricated in a foundry SOI MEMS process. The silicon microresonator is adapted as a timing element for a precision oscillator with a measured short-term Allan deviation of 0.6 ppb.
Index
Terms
Available to subscribers and IEEE members.
References
Available to subscribers and IEEE members.
Citing Documents
Available to subscribers and IEEE members.
Cart
