Tunable MEMS Actuated Microring Resonators
Ming-Chun Tien
Mathai, S.
Jin Yao
Wu, M.C.
Univ. of California, Oakland;
This paper appears in: Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on
Publication Date: Aug. 12 2007-July 16 2007
On page(s): 177-178
Location: Hualien,
ISBN: 978-1-4244-0641-8
INSPEC Accession Number: 9689197
Digital Object Identifier: 10.1109/OMEMS.2007.4373898
Current Version Published: 2007-10-29
Abstract
A simplified process has been developed to fabricate MEMS tunable microring resonators on six-inch silicon-on-insulator wafers. Deep UV lithography is used to create 220-nm-wide waveguides and microrings. The process is CMOS compatible. The transmission spectra change from a double resonance dip (under-coupling) to a broader single resonance dip (over-coupling) when the waveguide is moved closer to the microring. This is explained by coupled mode theory that includes the effect of backscattering in the microring.
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