Application of Full Factorial Design Method in MEMS Capacitive Thermal Sensor Sensitivity
Mehrban, M.
Kouravand, S.
Rezazadeh, G.
Donyavi, A.
Urmia Univ., Urmia;
This paper appears in: Semiconductor Electronics, 2006. ICSE '06. IEEE International Conference on
Publication Date: Oct. 29 2006-Dec. 1 2006
On page(s): 172-176
Location: Kuala Lumpur,
ISBN: 0-7803-9730-4
INSPEC Accession Number: 9892836
Digital Object Identifier: 10.1109/SMELEC.2006.381042
Current Version Published: 2007-07-02
Abstract
In this paper sensitivity of MEMS capacitive thermal sensors based on deflection of a bimetallic cantilever beam was investigated. Using design of experiment method, and applying a 25 factorial design the effect of factors in this sensor was calculated and main factors that affect on sensor's sensitivity were identified. Analysis of variance for the main factors of design and their interactions were studied for their significance.
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