Optomechatronic Design of Microassembly Systems for Manufacturing Hybrid Microsystems
Yang, G.
Gaines, J.A.
Nelson, B.J.
This paper appears in: Industrial Electronics, IEEE Transactions on
Publication Date: Aug. 2005
Volume: 52,
Issue: 4
On page(s): 1013- 1023
ISSN: 0278-0046
Digital Object Identifier: 10.1109/TIE.2005.851665
Current Version Published: 2005-08-01
Abstract
Microassembly systems are a class of representative optomechatronic systems that play a critical role in the fabrication, packaging, and interconnection of hybrid microsystems such as hybrid microelectromechanical systems. Optomechatronic integration is essential to the development of microassembly systems due to the basic importance of microscope optics to microassembly. In this paper, the role of microscope optics in microassembly systems is analyzed. The general architecture of microassembly systems is introduced. Unique properties of microscale optomechatronics that differ from macroscale optomechatronics are summarized. These fundamental differences motivate the definition and discussion of microoptomechatronics. Major methodology issues in optomechatronic design of microassembly systems are introduced using examples. A wavelet-based microscopic image segmentation technique is presented to demonstrate the strength of using the unique properties of microoptomechatronics in microscopic image information processing.
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