Identification and super-precision control of a linear stage driven by a voice coil motor
Jianfa Wang
Wensheng Yin
Yu Zhu
Guanghong Duan
Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing, China;
This paper appears in: Robotics, Automation and Mechatronics, 2004 IEEE Conference on
Publication Date: 1-3 Dec. 2004
Volume: 1,
On page(s): 192- 196 vol.1
ISSN:
ISBN: 0-7803-8645-0
INSPEC Accession Number: 8426334
Current Version Published: 2005-06-13
Abstract
Identification and control of an air bearing linear stage driven by a voice coil motor are considered. The load of the stage is more than 5 kg, and the model has to include the mode of mechanism for high bandwidth and high precision motion control. Identification based on normalized coprime factors is introduced for this purpose. A precise model with high order can be derived from the identification, but the order of the model is too high to control design, therefore, model reduction is performed. Finally, a polynomial pole-placement combined with sensitivity function shaping is carried out. The experimental result shows the stage can achieve 10 nm position step easily.
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