UHF micromechanical extensional wine-glass mode ring resonators
Yuan Xie
Sheng-Shian Li
Yu-Wei Lin
Zeying Ren
Nguyen, C.T.C.
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA;
This paper appears in: Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International
Publication Date: 8-10 Dec. 2003
On page(s): 39.2.1- 39.2.4
ISSN:
ISBN: 0-7803-7872-5
INSPEC Accession Number: 7862402
Digital Object Identifier: 10.1109/IEDM.2003.1269436
Current Version Published: 2004-03-03
Abstract
Vibrating polysilicon micromechanical ring resonators, utilizing a unique extensional wine-glass mode shape to achieve lower impedance than previous UHF resonators, have been demonstrated at frequencies as high as 1.2-GHz with a Q of 3,700, and 1.47-GHz (highest to date) with a Q of 2,300. The 1.2-GHz resonator exhibits a measured motional resistance of 560 kΩ with a dc-bias voltage of 20 V, which is 6× lower than measured on radial contour mode disk counterparts at the same frequency, and which can be driven down as low as 2 kΩ when a dc-bias voltage of 100 V and electrode-to-resonator gap spacing of 460 Å are used. The above high Q and low impedance advantages, together with the multiple frequency, on-chip integration advantages afforded by electrostatically-transduced μmechanical resonators, make this device an attractive candidate for use in the front-end RF filtering and oscillator functions needed by wireless communication devices.
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