Positioning performance and straightness error compensation of the magnetic levitation stage supported by the linear magnetic bearing
Oui-Serg Kim
Sang-Ho Lee
Dong-Chul Han
Samsung Electro-Mech., Suwon, South Korea;
This paper appears in: Industrial Electronics, IEEE Transactions on
Publication Date: Apr 2003
Volume: 50,
Issue: 2
On page(s): 374- 378
ISSN: 0278-0046
INSPEC Accession Number: 7569982
Digital Object Identifier: 10.1109/TIE.2003.809415
Current Version Published: 2003-04-08
Abstract
This paper reports high-precision motion control at the target position and the offline compensation of the straightness error occurring during the motion of the magnetically levitated stage supported by the linear magnetic bearing. The linear magnetic bearing is composed of electromagnets and sensors in the same module to enable easy maintenance and to reduce the machining error, and the conventional linear quadratic Gaussian control is adopted for the motion control of the stage. The test results show that the stage can compensate the straightness error precisely, so that it is expected that this stage can be applied to high-precision linear motion applications.
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