Electrostatic suspension of dielectrics
Jeon, J.U.
Higuchi, T.
Micro Syst. Lab., Samsung Adv. Inst. of Technol., Kyounggi;
This paper appears in: Industrial Electronics, IEEE Transactions on
Publication Date: Dec 1998
Volume: 45,
Issue: 6
On page(s): 938-946
ISSN: 0278-0046
References Cited: 6
CODEN: ITIED6
INSPEC Accession Number: 6113427
Digital Object Identifier: 10.1109/41.735338
Current Version Published: 2002-08-06
Abstract
This paper reports the successful electrostatic suspension of
dielectric materials. In order to implement a stable suspension, the
electrostatic forces exerted on a dielectric are actively controlled on
the basis of the measured suspension gap lengths. The principle of
electrostatic force generation for dielectrics is different from that
for conductors. By utilizing a stator electrode pattern containing many
boundaries over which potential differences exist, the suspension
characteristics, such as dynamic stability, suspension initiation time
and stiffness of lateral motion are greatly improved. The dynamic model
of the suspension system and the influence of the resistivity of a
dielectric on the closed-loop stability are described, followed by the
experimental apparatus and stabilizing controller. As dielectric
objects, glass plates have been suspended electrostatically at a gap
length of about 0.3 mm. Apart from the structure of the stator
electrode, the suspension initiation time is also influenced by air
humidity, glass type, supplied voltage and gap length, which have been
experimentally explored. Experimental results on the lateral dynamic
characteristics are also presented
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