Silicon-processed microneedles
Liwei Lin
Pisano, A.P.
Dept. of Mech. Eng. & Appl. Mech., Michigan Univ., Ann Arbor, MI;
This paper appears in: Microelectromechanical Systems, Journal of
Publication Date: Mar 1999
Volume: 8,
Issue: 1
On page(s): 78-84
ISSN: 1057-7157
References Cited: 23
CODEN: JMIYET
INSPEC Accession Number: 6207709
Digital Object Identifier: 10.1109/84.749406
Current Version Published: 2002-08-06
Abstract
A combination of surface- and bulk-micromachining techniques is
used to demonstrate the feasibility of fabricating microhypodermic
needles. These microneedles, which may be built with on-board fluid
pumps, have potential applications in the chemical and biomedical fields
for localized chemical analysis, programmable drug-delivery systems, and
very small, precise sampling of fluids. The microneedles are fabricated
in 1, 3, and 6 mm lengths with fully enclosed channels formed of silicon
nitride. The channels are 9 μm in height and have one of two widths,
30 or 50 μm. Access to the channels is provided at their shank and
distal ends through 40-μm square apertures in the overlying silicon
nitride layer. The microneedles are found to be intact and undamaged
following repetitive insertion into and removal from animal-muscle
tissue (porterhouse steak)
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