Magnetic microactuators based on polymer magnets
Lagorce, L.K.
Brand, O.
Allen, M.G.
Centre d'Elaboration de Mater. et d'Etudes Struct., CNRS, Toulouse;
This paper appears in: Microelectromechanical Systems, Journal of
Publication Date: Mar 1999
Volume: 8,
Issue: 1
On page(s): 2-9
ISSN: 1057-7157
References Cited: 19
CODEN: JMIYET
INSPEC Accession Number: 6207699
Digital Object Identifier: 10.1109/84.749396
Current Version Published: 2002-08-06
Abstract
Integrated permanent magnet microactuators have been fabricated
using micromachined polymer magnets. The hard magnetic material utilized
is a polymer composite, consisting of magnetically hard ceramic ferrite
powder imbedded in a commercial epoxy resin to a volume loading of 80%.
The magnets have the form of thin disks approximately 4 mm in diameter
and 90 μm in thickness. These disks have been magnetized in the
thickness direction, and even in this geometrically unfavorable
direction showed typical permanent magnet behavior with an intrinsic
coercivity Hci of 4000 Oe (320 kA/m) and a residual induction
Br of 600 Gauss (60 mT). Cantilever beam-type magnetic
actuators carrying a screen-printed disk magnet on their free ends have
been fabricated on an epoxy board. A planar coil on the opposite side of
the substrate is used to drive the beams vertically. The actuators
exhibit hard magnetic behavior allowing both attraction and repulsion by
reversing the current direction. Static and dynamic testing of the
magnetic actuators have been performed. The experimental data are
compared with theoretical results obtained from both finite element
simulations and analytical models. Good agreement is obtained between
simulation and experiment
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