Abstract:
This work focuses on the simulation and control of a porous silicon thin film deposition process used in the manufacture of thin film solar cell systems. Initially, the p...Show MoreMetadata
Abstract:
This work focuses on the simulation and control of a porous silicon thin film deposition process used in the manufacture of thin film solar cell systems. Initially, the process is simulated via kinetic Monte Carlo (kMC) method on a triangular lattice. Then a closed-form differential equation model is introduced to predict the dynamics of the kMC model and closed-loop system, and the model parameters in this model are identified by fitting to open-loop kMC simulation results. Finally, a model predictive controller (MPC) is designed and results demonstrate that both film thickness and porosity can be regulated to desired values.
Published in: 2013 American Control Conference
Date of Conference: 17-19 June 2013
Date Added to IEEE Xplore: 15 August 2013
ISBN Information: