Towards athermal nanoplasmonic resonators based on Cu-Tio2-Si hybrid plasmonic waveguide

Owing to the negative thermo-optic coefficient (TOC) of titanium dioxide, the real effective modal index of Cu-TiO
₂
-Si hybrid plasmonic waveguides can be potentially temperature independent. High-performance Cu-TiO
₂
-Si waveguide-ring resonators (WRRs) are experimentally demonstrated on SOI platform using standard CMOS technology. TOC of the group index is measured to be ~1.09×10
^-4
K
^-1
for a WRR with 220-nm-high Si core and 58-nm-thick TiO
₂
. TOC of the as-deposited TiO
₂
is estimated to ~ -1.0×10
^-4
K
^-1
.