Ultracompact Si electro-optic modulator based on horizontal Cu-insulator-Si-insulator-Cu nanoplasmonic waveguide

We experimentally demonstrate ultracompact Si electro-optic modulators based on horizontal Cu-insulator-Si-insulator-Cu nanoplasmonic waveguides on SOI substrates using standard CMOS technology. A modulator with 1-μm-long phase shifter exhibits 9-dB extinction ratio under 6-V/10-kHz voltage swing.