High-power high-speed waveguide photodiodes and photodiode arrays heterogeneously integrated on siliconon-insulator

We demonstrate InP-based modified uni-traveling carrier photodiodes on silicon-on-insulator (SOI) waveguides with an internal responsivity of 0.85 A/W, up to 30 GHz bandwidth, and high RF output power. Photodiode arrays exceed a saturation current-bandwidth-product of 630 mA·GHz and +10 dBm RF output power at 20 GHz.