Magnetically actuated, addressable microstructures
Judy, J.W.
Muller, R.S.
Dept. of Electr. Eng., California Univ., Los Angeles, CA;
This paper appears in: Microelectromechanical Systems, Journal of
Publication Date: Sep 1997
Volume: 6,
Issue: 3
On page(s): 249-256
ISSN: 1057-7157
References Cited: 14
CODEN: JMIYET
INSPEC Accession Number: 5702390
Digital Object Identifier: 10.1109/84.623114
Current Version Published: 2002-08-06
Abstract
Surface-micromachined, batch-fabricated structures that combine
plated-nickel films with polysilicon mechanical flexures to produce
individually addressable, magnetically activated devices have been
fabricated and tested. Individual microactuator control has been
achieved in two ways: (1) by actuating devices using the magnetic field
generated by coils integrated around each device and (2) by using
electrostatic forces to clamp selected devices to an insulated ground
plane while unclamped devices are freely moved through large
out-of-plane excursions by an off-chip magnetic field. The present
application for these structures is as micromirrors for microphotonic
systems where they can be used either for selection from an array of
mirrors or else individually for switching among fiber paths
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