Biocompatible nanolayered polymerization of MEMS devices

Deposition of polymeric and biocompatible nanolayers on the solid-state substrates is done using a simple vacuum chamber. The chemical characteristics of the deposited nanolayer are analyzed using Fourier transform infrared spectroscopy and X-ray photoelectron spectroscopy. The surface morphology of the nanolayers is analyzed using contact angle goniometer and scanning electron microscopy. The coated nanolayers show excellent stability in different chemical surroundings including the physiological pH therefore making it applicable in coating 3D MEMS devices and body implants which need medicated coating. A micropore is coated with this approach and results depict uniform coating of the structure.