Si IC-compatible inductors and LC passive filters
Nguyen, N.M.
Meyer, R.G.
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA;
This paper appears in: Solid-State Circuits, IEEE Journal of
Publication Date: Aug 1990
Volume: 25,
Issue: 4
On page(s): 1028-1031
ISSN: 0018-9200
References Cited: 7
CODEN: IJSCBC
INSPEC Accession Number: 3780961
Digital Object Identifier: 10.1109/4.58301
Current Version Published: 2002-08-06
Abstract
Passive inductors and LC filters fabricated in standard
Si IC technology are demonstrated. Q-factors from three to
eight and inductors up to 10 nH in the gigahertz range have been
realized. Measurements on a five-pole maximally flat low-pass filter
give midband insertion loss and -3 dB bandwidth close to the nominal
design values of 2.25 dB and 880 MHz
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