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Flexible plastic single-crystal si CMOS
Zhenqiang Ma Hao-Chih Yuan Celler, G.K.
Dept. of Electr. & Comput. Eng., Univ. of Wisconsin-Madison, Madison, WI;

This paper appears in: Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on
Publication Date: 20-23 Oct. 2008
On page(s): 1009-1012
Location: Beijing,
ISBN: 978-1-4244-2185-5
INSPEC Accession Number: 10440682
Digital Object Identifier: 10.1109/ICSICT.2008.4734723
Current Version Published: 2008-12-30

Abstract
In this paper, the materials, processing and device characteristics of flexible Si CMOS on plastic substrates are reviewed. The methods to create transferrable single-crystal Si nanomembranes are described first followed by the description of doping and transfer techniques developed for the nanomembranes. The preliminary device characteristics of CMOS and inverters on plastic substrates are presented.

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