ПЕРСПЕКТИВНI ТЕХНОЛОГIII МЕТОДИ ПРОЕКТУВАННЯ МЕМС Матерiа четвертоï Мiжнаролноï конференцiï молодих вчених MEMSTECH’ 2008
  

This paper appears in: Perspective Technologies and Methods in MEMS Design, 2008. MEMSTECH 2008. International Conference on
Publication Date: 21-24 May 2008
On page(s): 144-144
Location: Lviv, Ukraine,
ISBN: 978-966-2191-00-4
Digital Object Identifier: 10.1109/MEMSTECH.2008.4558765
Current Version Published: 2008-07-09