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Integrated Micromechanical Radio Front-Ends
Nguyen, C.T.-C.
Dept. of Electr. Eng. & Comput. Sci., Univ. of California at Berkeley, Berkeley, CA;

This paper appears in: VLSI Technology, Systems and Applications, 2008. VLSI-TSA 2008. International Symposium on
Publication Date: 21-23 April 2008
On page(s): 3-4
Location: Hsinchu,
ISSN: 1930-885X
ISBN: 978-1-4244-1614-1
INSPEC Accession Number: 10065046
Digital Object Identifier: 10.1109/VTSA.2008.4530773
Current Version Published: 2008-05-23

Abstract
An overview of MEMS technologies capable of realizing the RF front-end frequency gating function needed by true software-defined cognitive radios is presented. Among the technologies described are vibrating disk micromechanical resonators that exhibit record on-chip frequency-Q products; medium-scale integrated micromechanical circuits that implement on/off switchable filter banks; and a process technology that integrates nickel MEMS together with foundry CMOS transistors in a fully monolithic single-chip process.

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