Large Fabrication Tolerance for VCSELs Using High-Contrast Grating
Ye Zhou
Huang, M.C.Y.
Chang-Hasnain, C.J.
California Univ., Berkeley;
This paper appears in: Photonics Technology Letters, IEEE
Publication Date: March15, 2008
Volume: 20,
Issue: 6
On page(s): 434-436
ISSN: 1041-1135
INSPEC Accession Number: 9818906
Digital Object Identifier: 10.1109/LPT.2008.916969
Current Version Published: 2008-02-22
Abstract
We report the experimental demonstration of a large fabrication tolerance for a single-layer, highly reflective high-index-contrast subwavelength grating (HCG) mirror. HCG vertical-cavity surface-emitting lasers (VCSELs) are demonstrated with plusmn20% variation in the HCG critical dimension. Emission wavelength of the HCG-VCSEL shifts only 2 nm with 40% change in grating spacing and 8% change in grating period.
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