Silicon Microresonators with MEMS-Actuated Tunable Couplers
Wu, M.C.
Jin Yao
Ming-Chang Lee
Berkeley Sensor & Actuator Center, California Univ., Berkeley, CA;
This paper appears in: Group IV Photonics, 2007 4th IEEE International Conference on
Publication Date: 19-21 Sept. 2007
On page(s): 1-3
Location: Tokyo,
ISBN: 978-1-4244-0934-1
INSPEC Accession Number: 10089357
Current Version Published: 2007-10-15
Abstract
We review the current state-of-the-art of tunable microdisk/microtoroidal resonators with MEMS-actuated couplers. They are key enabling elements of many wavelength-division-multiplexing switches and tunable filters. The performance of dynamic add-drop and bandwidth-tunable filters will be discussed.
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