Monolithic Integrated Piezoelectric MEMS-Tunable VCSEL
Huang, M.C.Y.
Kan Bun Cheng
Ye Zhou
Pisano, A.P.
Chang-Hasnain, C.J.
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA;
This paper appears in: Selected Topics in Quantum Electronics, IEEE Journal of
Publication Date: March-april 2007
Volume: 13,
Issue: 2
On page(s): 374-380
Location: Haifa, Israel,
ISSN: 1077-260X
INSPEC Accession Number: 9422254
Digital Object Identifier: 10.1109/JSTQE.2007.894056
Current Version Published: 2007-04-23
Abstract
A novel actuation mechanism that utilizes the inherent piezoelectric properties of Al xGa1-x As compounds is presented for short-wavelength microelectromechanical systems tunable vertical-cavity surface-emitting laser centered at 850 nm. Piezoelectric actuation can provide precise bidirectional displacements and linear tuning characteristics with respect to the applied voltage, does not suffer from travel limitations and catastrophic electrical damage, consumes low power (~1 muW), and has a relatively fast response compared to thermal actuation. In addition, piezoelectric actuation based on AlxGa 1-xAs films offers a large piezoelectric coupling coefficient comparable to those of zinc oxide and quartz, and it can be integrated with high-speed electronic and optoelectronic devices. Single-mode emission with a linear continuous tuning range of 3 nm and low power consumption were experimentally obtained
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