RTSPC: a software utility for real-time SPC and tool data analysis
Lee, S.F.
Boskin, E.D.
Hao Cheng Liu
Wen, E.H.
Spanos, C.J.
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA;
This paper appears in: Semiconductor Manufacturing, IEEE Transactions on
Publication Date: Feb 1995
Volume: 8,
Issue: 1
On page(s): 17-25
ISSN: 0894-6507
References Cited: 11
CODEN: ITSMED
INSPEC Accession Number: 4894804
Digital Object Identifier: 10.1109/66.350754
Current Version Published: 2002-08-06
Abstract
Competition in the semiconductor industry is forcing manufacturers
to continuously improve the capability of their equipment. The analysis
of real-time sensor data from semiconductor manufacturing equipment
presents the opportunity to reduce the cost of ownership of the
equipment. Previous work by the authors showed that time series
filtering in combination with multivariate analysis techniques can be
utilized to perform statistical process control, and thereby generate
real-time alarms in the case of equipment malfunction. A more robust
version of this fault detection algorithm is presented. The algorithm is
implemented through RTSPC, a software utility which collects real-time
sensor data from the equipment and generates real-time alarms, Examples
of alarm generation using RTSPC on a plasma etcher are presented
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