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Silicon-Based On-Chip Micromirrors for DWDM Wavelength-Selective Crossconnects
Chao-Hsi Chi   Chenlu Hou   Chi-Hung Lee   Hah, D.   Wu, M.C.  
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA;

This paper appears in: Optical MEMS and Their Applications Conference, 2006. IEEE/LEOS International Conference on
Publication Date: 21-24 Aug. 2006
On page(s): 130-131
Location: Big Sky, MT,
ISBN: 0-7803-9562-X
INSPEC Accession Number: 9274309
Digital Object Identifier: 10.1109/OMEMS.2006.1708299
Current Version Published: 2006-10-09

Abstract
We report on a silicon-based on-chip micromirror array for monolithic wavelength-selective crossconnects. The 75-mum mirror pitch matches to the DWDM grids with 100 GHz spacing. A maximum mechanical scan angle of 6.5 degree has been achieved

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