Silicon-Based On-Chip Micromirrors for DWDM Wavelength-Selective Crossconnects
Chao-Hsi Chi
Chenlu Hou
Chi-Hung Lee
Hah, D.
Wu, M.C.
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA;
Abstract
We report on a silicon-based on-chip micromirror array for monolithic wavelength-selective crossconnects. The 75-mum mirror pitch matches to the DWDM grids with 100 GHz spacing. A maximum mechanical scan angle of 6.5 degree has been achieved
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