Silicon Microtoroidal Resonators with Integrated MEMS Tunable Optical Coupler
Jin Yao
Leuenberger, D.
Lee, M.-C.M.
Wu, M.C.
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA;
Abstract
A single crystalline silicon microtoroidal resonator with integrated MEMS tunable optical coupler is demonstrated for the first time. The coupling coefficient is continuously tuned from almost zero up to 13.3%
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