Statistical significance of error-corrupted IC measurements
Spanos, C.J.
Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA;
This paper appears in: Semiconductor Manufacturing, IEEE Transactions on
Publication Date: Feb 1989
Volume: 2,
Issue: 1
On page(s): 23-28
ISSN: 0894-6507
References Cited: 12
CODEN: ITSMED
INSPEC Accession Number: 3357859
Digital Object Identifier: 10.1109/66.17000
Current Version Published: 2002-08-06
Abstract
The impact of measurement errors on the statistical significance
of data collected from an IC manufacturing facility is discussed. On the
assumption that the errors are not systematic, are normally distributed,
and have known variances, estimators are introduced for the formal
evaluation of this impact. These estimators can be used to calculate
confidence intervals, to test equivalence hypotheses, and to predict the
required sample size so that a desired level of confidence is maintained
in the presence of these measurement errors. The aforementioned concepts
are illustrated through an example in which critical decisions
concerning the status of an NMOS process are based on error-corrupted
measurements
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