Microfabricated torsional actuators using self-aligned plastic deformation of silicon
Jongbaeg Kim
Hyuck Choo
Lin, L.
Muller, R.S.
Sch. of Mech. Eng., Yonsei Univ., Seoul, South Korea;
This paper appears in: Microelectromechanical Systems, Journal of
Publication Date: June 2006
Volume: 15,
Issue: 3
On page(s): 553- 562
ISSN: 1057-7157
INSPEC Accession Number: 8975752
Digital Object Identifier: 10.1109/JMEMS.2006.876789
Current Version Published: 2006-06-05
Abstract
In this paper, we describe angular vertical-comb-drive torsional microactuators made in a new process that induces residual plastic deformation of single-crystal-silicon torsion bars. Critical dimensions of the vertically interdigitated moving-and fixed-comb actuators are self-aligned in the fabrication process and processed devices operate stably over a range of actuation voltages. We demonstrate MEMS scanning mirrors that resonate at 2.95kHz and achieve optical scan angles up to 19.2 degrees with driving voltages of 40Vdc plus 13Vpp. After continuous testing of five billion cycles at the maximum scanning angle, we do not observe any signs of degradation in the plastically deformed silicon torsion bars.
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