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Wavelength- and bandwidth-tunable filters based on MEMS-actuated microdisk resonators
Jin Yao Lee, M.-C.M. Leuenberger, D. Wu, M.C.
Dept. Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA;

This paper appears in: Optical Fiber Communication Conference, 2006 and the 2006 National Fiber Optic Engineers Conference. OFC 2006
Publication Date: 5-10 March 2006
On page(s): 3 pp.-
ISBN: 1-55752-803-9
INSPEC Accession Number: 8986155
Current Version Published: 2006-06-19

Abstract
A wavelength- and bandwidth- tunable filter with microelectromechanical-system (MEMS)-actuated waveguides is first demonstrated on a silicon-based microdisk resonator. Integrated microheaters enabled wavelength tuning up to 125 GHz. Bandwidth can be tuned from 12.0 to 41.2 GHz by coupling control.

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