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Suspension design analysis on the performance of MEMS area-changed lateral capacitive accelerometer
Bais, B. Majlis, B.Y.
Inst. of Microengineering & Nanoelectronics, Univ. Kebangsaan Malaysia, Selangor, Malaysia;

This paper appears in: Semiconductor Electronics, 2004. ICSE 2004. IEEE International Conference on
Publication Date: 7-9 Dec. 2004
On page(s): 5 pp.-
ISBN: 0-7803-8658-2
INSPEC Accession Number: 8857641
Digital Object Identifier: 10.1109/SMELEC.2004.1620900
Current Version Published: 2006-04-18

Abstract
In this paper, variations of folded beam suspension design are analyzed and simulated in order to study its effect on the performance of an area-changed MEMS lateral capacitive accelerometer. The simulation was carried out using Coventorware2003. Mechanical issues like spring constants, stress distributions, cross-axis sensitivities and shock survivability are discussed.

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