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Vision-based teleoperation of a stroboscopic microscopic interferownetric system for remote dynamic MEMS testing
Garmire, D. Muller, R.S. Demmel, J.
Berkeley Sensor & Actuator Center, California Univ., Berkeley, CA;

This paper appears in: Optical MEMS and Their Applications Conference, 2005. IEEE/LEOS International Conference on
Publication Date: 1-4 Aug. 2005
On page(s): 163-164
Location: Oulu,
ISBN: 0-7803-9278-7
INSPEC Accession Number: 8634555
Digital Object Identifier: 10.1109/OMEMS.2005.1540129
Current Version Published: 2005-11-21

Abstract
We demonstrate a system that automatically locates MEMS structures under a microscope equipped with a 3 DOF stage. It correlates images directly with the chip-mask layout and is especially useful for teleoperated experiments

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