Optical properties of microlenses fabricated using hydrophobic effects and polymer-jet-printing technology
Choo, H.
Muller, R.S.
Berkeley Sensor & Actuator Center, California Univ., Berkeley, CA, USA;
This paper appears in: Optical MEMS, 2003 IEEE/LEOS International Conference on
Publication Date: 18-21 Aug. 2003
On page(s): 169- 170
ISSN:
ISBN: 0-7803-7830-X
INSPEC Accession Number: 7978009
Digital Object Identifier: 10.1109/OMEMS.2003.1233519
Current Version Published: 2003-09-29
Abstract
High-precision microlenses with excellent optical characteristics is described. The lenses are formed precisely at desired locations on a wafer using a polymer-jet system in which hydrophobic effects define the lens diameter and surface tension creates a high-quality optical surface. This hybrid method enables researchers to define the locations and diameters of microlenses with ±1 μm precision as well as to control the curvatures of the microlenses accurately.
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