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An integrated, vertical-drive, in-plane-sense microgyroscope
Bhave, S.A. Seeger, J.I. Xuesong Jiang Boser, B.E. Howe, R.T. Yasaitis, J.
Berkeley Sensor & Actuator Center, Univ. of California, Berkeley, USA;

This paper appears in: TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Publication Date: 8-12 June 2003
Volume: 1, On page(s): 171- 174 vol.1
ISSN:
ISBN: 0-7803-7731-1
INSPEC Accession Number: 7936562
Current Version Published: 2003-07-28

Abstract
This paper describes the principle of operation and experimental results of a Y-axis ΣΔ force-feedback gyroscope. The gyroscope was fabricated in Analog Devices' monolithic Modular-MEMS process with 6μm thick structural polysilicon and 0.8μm CMOS. The sensor utilizes vertical (Z-axis) actuation of the proof mass to enable in-plane (X-axis) differential sensing of the Coriolis force. Two orthogonally-oriented gyroscopes form a dual-axis rate sensor. The gyroscope achieves 8°/sec/√Hz noise floor, for operation at ambient pressure.

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