Polysilicon microgripper
Kim, C.-J.
Pisano, A.P.
Muller, R.S.
Lim, M.G.
Berkeley Sensor & Actuator Center, California Univ., CA;
This paper appears in: Solid-State Sensor and Actuator Workshop, 1990. 4th Technical Digest., IEEE
Publication Date: 4-7 Jun 1990
On page(s): 48-51
Meeting Date: 06/04/1990 - 06/07/1990
Location: Hilton Head Island, SC, USA
References Cited: 5
INSPEC Accession Number: 3907846
Digital Object Identifier: 10.1109/SOLSEN.1990.109818
Current Version Published: 2002-08-06
Abstract
A polysilicon, electrostatic, comb-drive microgripper has been
designed, fabricated, and tested. Its main features are a flexible,
cantilever comb-drive arm with a bidirectional actuation scheme and an
overrange protector. Three different electromechanical models are
developed and, along with fabrication constraints, are employed to
design the microgripper and to simulate its performance. Experiments
have demonstrated that a gripping range of 10 μm can be accommodated
with an applied potential of 20 V. The motion dependence on drive
voltage has been measured and compared with model prediction. The
gripper motion is observed to be smooth, stable, and controllable.
Measurements were made up to the maximum of the voltage source (50 V)
Index
Terms
Available to subscribers and IEEE members.
References
Available to subscribers and IEEE members.
Citing Documents
Available to subscribers and IEEE members.
Cart
