Low-voltage-actuated MEMS mirror array with high fill factor for photonic switch applications

This paper describes the design, fabrication and characterization of a novel, low-voltage-actuated MEMS tilting mirror array with high fill factor (91%). The movable ladder-shaped electrode is placed apart from the rotation axis to increase a rotational torque. The balancer and H-shaped hinge were employed to ensure the good anti-vibration performance. The measured DC scanning properties and resonant frequency agree well with simulated values. The micromirror achieved a rotation angle of 2° at low operating voltage (<;20V). This mirror will be useful for an application of photonic switches in wavelength division multiplexing networks.