Mechanical Response Evaluation of High-Thermally-Stable-Grade Parylene Spring

Mechanical response of high-thermally-stable-grade parylene (diX-SR/HR) is investigated for flexible spring applications. Pendulum structures with a high-aspect-ratio beam are microfabricated using different parylene materials, and their amplitude and stress at resonant oscillation are measured. Based on fatigue tests and measurements of the temperature coefficient of Young's modulus, MEMS structures with diX-SR/HR are proved to have better thermal tolerance than parylene-C, while they have almost the same mechanical properties as parylene-C.