Referenced Items are not available for this document.
We report a novel, miniature Fourier transform spectrometer with a linear architecture that works by sampling a standing wave. The spectrometer consists of an electrostatically actuated microelectromechanical mirror with on-resonance displacement of up to 65 μm, a thin-film photodetector, and an electrical back plane for actuating the mirror. The integrated device offers mirror stability and fixed relative alignment of the three components. The spectrometer has better than 32-nm resolution at 633 nm
Published in:
Selected Topics in Quantum Electronics, IEEE Journal of
(Volume:8
,
Issue:
1
)
Date of Publication: Jan/Feb 2002
- Page(s):
- 98 - 105
- ISSN :
- 1077-260X
- INSPEC Accession Number:
- 7227603
- Digital Object Identifier :
- 10.1109/2944.991404
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 07 August 2002
- Issue Date :
- Jan/Feb 2002
- Sponsored by :
- IEEE Photonics Society
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