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Thermal noise and radiation pressure in MEMS Fabry-Perot tunable filters and lasers

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4 Author(s)
Tucker, RodneyS. ; Agilent Labs., Agilent Technol., Palo Alto, CA, USA ; Baney, D.M. ; Sorin, W.V. ; Flory, Curt A.

In this paper, we examine thermal noise and radiation-pressure effects in MEMS tunable Fabry-Perot etalons. We show that thermal noise causes a jitter in the center wavelength in very high finesse etalons. In turn, the jitter causes an effective increase in the time-averaged filter bandwidth. Radiation pressure is of little consequence in conventional Fabry-Perot etalons, but it can give rise to nonlinearities and hysteresis in the tuning response of high-finesse MEMS filters. We develop models of noise and optical nonlinearities and compare the models with a series of measurements on commercial tunable high-finesse MEMS Fabry-Perot etalons

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Selected Topics in Quantum Electronics, IEEE Journal of  (Volume:8 ,  Issue: 1 )