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Planar microoptomechanical waveguide switches

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5 Author(s)
Bakke, T. ; Dept. of Phys. Electron., Norwegian Univ. of Sci. & Technol., Trondheim, Norway ; Tigges, C.P. ; Lean, J.J. ; Sullivan, T.
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Planar micromechanical waveguide switches based on lateral deflection of a cantilever beam are presented. Two material systems have been used: a GaAs-AlGaAs structure with integrated waveguides and a silicon-on-insulator (SOI), with postprocessed polymeric waveguides. The switches are characterized by low actuation voltage (3-20 V), short switching times (32-200 μs), and low crosstalk (< -30 dB)

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Selected Topics in Quantum Electronics, IEEE Journal of  (Volume:8 ,  Issue: 1 )