Referenced Items are not available for this document.
In the realm of spin coatings the method of using puddle dispense has been the preferred method to use. We will de-throne the puddle dispense king with a new method that is economical, fast and reliable. This method dispenses the coating material in a uniformly thin line from the outside edge of the substrate to the center using significantly less material, in the same or less cycle time as used for the puddle dispense. The reverse radial dispense method will be defined, characterized and optimized for a production worthy process using a standard photo definable polymer material
Published in:
Advanced Packaging Materials, 2002. Proceedings. 2002 8th International Symposium on
Date of Conference: 2002
- Page(s):
- 302 - 310
- Meeting Date :
- 03 Mar 2002-06 Mar 2002
- Print ISBN:
- 0-7803-7434-7
- INSPEC Accession Number:
- 7335699
- Conference Location :
- Stone Mountain, GA
- Digital Object Identifier :
- 10.1109/ISAPM.2002.990403
- Product Type:
- Conference Publications
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