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Characteristics of hard DLC film formed by gas cluster ion beam assisted deposition

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10 Author(s)
Kanda, Kazuhiro ; Lab. of Adv. Sci. & Technol. for Ind., Himeji Inst. of Technol., Hyogo, Japan ; Kitagawa, T. ; Shimizugawa, Yutaka ; Haruyama, Yuichi
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DLC films formed by gas cluster ion beam (GCIB) assisted deposition were investigated by NEXAFS using synchrotron radiation.

Published in:

Microprocesses and Nanotechnology Conference, 2001 International

Date of Conference:

Oct. 31 2001-Nov. 2 2001