By Topic

Dynamic thermal sensor - principles in MEMS for fluid characterization

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
H. Ernst ; Inst. for Microsystem. Technol., Freiburg Univ., Germany ; A. Jachimowicz ; G. Urban

Using thin-film technology with its characteristic low masses and high aspect ratios a new range of possibilities is made available for the use of dynamic thermal measuring principles. Based on this, a micromachined sensor was developed for the measurement of transient thermal signal responses leading to the thermal characterization of fluids at low sample volumes. The achieved resolution allowed the measurement of thermal parameters of the investigated fluids, i.e., thermal conductivity and specific heat, inside microfluidic systems at a high sensitivity, enabling the detection of inter-fluid boundaries, e.g., as found in micromixers and -reactors, making the sensor a useful tool for micro fluidic system characterization. This is achieved via the measurement of the frequency dependent thermal signal response

Published in:

IEEE Sensors Journal  (Volume:1 ,  Issue: 4 )