Referenced Items are not available for this document.
Developed a novel smart optoelectromechanical structure, fabricated using a multilayer, metal-dielectric photonic band gap (PBG) structure. We discuss innovative devices with electrically controllable optical properties that can be used as sensors with optical output signals for applications in harsh or hostile environments (pressure sensors, micro gravimeter, or micro accelerometer) or as optical modulators and optical limiters. Theoretical models of these novel devices together with experimental prototypes have been developed, and characterization of the devices has been performed. Moreover, microelectromechanical devices have been studied for application to this field and are presented. In particular, the problem of realizing highly sensitive accelerometers has been addressed, and it will be shown that the proposed approach allows detecting displacements of a few nanometers
Published in:
Sensors Journal, IEEE
(Volume:1
,
Issue:
4
)
Date of Publication: Dec 2001
- Page(s):
- 288 - 295
- ISSN :
- 1530-437X
- INSPEC Accession Number:
- 7185909
- Digital Object Identifier :
- 10.1109/7361.983468
- Date of Current Version :
- 06 August 2002
- Issue Date :
- Dec 2001
- Sponsored by :
- IEEE Sensors Council
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