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Deep level transient spectroscopy: instrumentation induced anomalous characteristics

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2 Author(s)
A. Marshall ; Dept. of Electr. & Electron. Eng., Trent Polytech., Nottingham, UK ; H. G. Maguire

The authors attempted to clarify, compare, and contrast some previously unpublished difficulties encountered in the operation of deep-level transient spectroscopy (DLTS) systems, and describe corrective measures where applicable, including instrumentation and deep level anomalies which may affect capture cross section designations, such as pulse squaring and degeneracy factor effects. Thermal lag between sample and sensor has been demonstrated to cause the apparent peak temperatures of deep levels to be in error by several degrees. In addition, analysis of deep level data from a single ΔC-vs.-T plot has been achieved from half-peak-height points of the graph, for use where no other data are available from the sample under test. Trap depth determination from a single thermal scan of fragile Schottky barriers was considered

Published in:

IEEE Transactions on Instrumentation and Measurement  (Volume:37 ,  Issue: 4 )