Referenced Items are not available for this document.
Double-gate FinFET devices with asymmetric and symmetric polysilicon gates have been fabricated. Symmetric gate devices show drain currents competitive with fully optimized bulk silicon technologies. Asymmetric-gate devices show |V/sub t/|/spl sim/0.1 V, with off-currents less than 100 nA/um at V/sub gs/=0.
Published in:
Electron Devices Meeting, 2001. IEDM '01. Technical Digest. International
Date of Conference: 2-5 Dec. 2001
- Page(s):
- 19.5.1 - 19.5.4
- Meeting Date :
- 02 Dec 2001-05 Dec 2001
- Print ISBN:
- 0-7803-7050-3
- INSPEC Accession Number:
- 7238991
- Conference Location :
- Washington, DC, USA
- Digital Object Identifier :
- 10.1109/IEDM.2001.979530
- Product Type:
- Conference Publications
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