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Monolithic silicon optoelectronic biochips

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4 Author(s)
Misiakos, K. ; NCSR "Demokritos", Microelectron. Inst., Athens, Greece ; Kakabakos, S.E. ; Douvas, A. ; Argitis, P.

This work presents results on protein detection through a monolithically integrated silicon optoelectronic transducer. Also, we demonstrate the enabling technologies for developing high probe density optical biochips that can be read out without the need of external optical components. Experimental results are presented that demonstrate sensitive protein detection using biotin and protein coated chips as well as probe patterning using biocompatible photoresist.

Published in:

Electron Devices Meeting, 2001. IEDM '01. Technical Digest. International

Date of Conference:

2-5 Dec. 2001