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Using a 6-metal, copper 0.18-/spl mu/m CMOS technology, a 15-GHz on-chip wireless interconnect system has been demonstrated. The transmission frequency and distance (5.6 mm) of on-chip wireless interconnection have been almost doubled compared to the previously reported system. In addition, an integrated transmitter for on-chip wireless interconnection has been demonstrated. Lastly, the RF potential of CMOS technology for >10 GHz is assessed.