Referenced Items are not available for this document.
Results are presented for long throw and ionized PVD layers for W-plug liner applications. 245 mm and 430 mm long throw modules are discussed, the latter being shown to be applicable to sub-0.17 μm contacts when combined with very low process pressures. Data is presented showing that stable contacts can be produced without the damage risks associated with high energy ionized PVD processes. For metal applications above contact, a novel PVD module is shown to have particular benefits at via level. Chain data is presented showing >15% reduction in via resistance compared to any combination of i-PVD/long throw Ti/TiN sequences
Published in:
Advanced Semiconductor Manufacturing Conference, 2001 IEEE/SEMI
Date of Conference: 2001
- Page(s):
- 97 - 100
- Meeting Date :
- 23 Apr 2001-24 Apr 2001
- ISSN :
- 1078-8743
- Print ISBN:
- 0-7803-6555-0
- INSPEC Accession Number:
- 7023850
- Conference Location :
- Munich
- Digital Object Identifier :
- 10.1109/ASMC.2001.925625
- Product Type:
- Conference Publications
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