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Fabrication of Mo/Au transition-edge sensors for X-ray spectrometry

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8 Author(s)
Tralshawala, N. ; NASA Goddard Space Flight Center, Greenbelt, MD, USA ; Brekosky, R.P. ; Li, M.J. ; Figueroa-Feliciano, E.
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We present fabrication details of our Mo/Au X-ray microcalorimeters, which are being developed as one of the candidate high resolution spectrometers for the Constellation-X mission. We have reproducibly fabricated Mo/Au transition-edge sensors with Tc's of ~100 mK on etched silicon nitride membranes and connected via superconducting Nb leads. Our single pixel devices have, so far, attained resolution of 3.7 eV at 3.3 keV. We also discuss our plans for fabrication and testing of fully functional multi-pixel array of X-ray microcalorimeters

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Applied Superconductivity, IEEE Transactions on  (Volume:11 ,  Issue: 1 )